{"entity":{"type":"insider","cik":"0001689237","url":"/insider/0001689237","json_url":"/insider/0001689237.json","name":"Low Russell","name_source":"as-filed","also_issuer":false,"cross_url":null},"coverage_statement":{"n_transactions":16,"n_filings":13,"first":"2020-05-26","last":"2026-05-07","span_basis":"filed_date"},"name_variants":[{"name":"Low Russell","source":"filing","n_filings":13,"first_seen":"2020-05-26","last_seen":"2026-05-07"}],"transactions":[{"id":5788304,"accession":"0001689237-26-000010","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001689237-26-000010","line_url":"/filing/0001689237-26-000010#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (PRESIDENT AND CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"PRESIDENT AND CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":7468.0,"shares_display":"7,468","price_per_share":156.75,"price_display":"156.75","price_state":"stated","total_value":1170609.0,"total_display":"1,170,609.00","total_whole":"1,170,609","shares_owned_after":123570.0,"shares_owned_after_display":"123,570","ownership_form":"D","is_10b5_1":null,"transaction_date":"2026-05-06","filed_date":"2026-05-07","scope":"insider"},{"id":5968306,"accession":"0001689237-26-000008","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001689237-26-000008","line_url":"/filing/0001689237-26-000008#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (PRESIDENT AND CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"PRESIDENT AND CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":1244.0,"shares_display":"1,244","price_per_share":138.86,"price_display":"138.86","price_state":"stated","total_value":172741.84,"total_display":"172,741.84","total_whole":"172,742","shares_owned_after":131038.0,"shares_owned_after_display":"131,038","ownership_form":"D","is_10b5_1":null,"transaction_date":"2026-05-01","filed_date":"2026-05-04","scope":"insider"},{"id":5899132,"accession":"0001689237-26-000006","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001689237-26-000006","line_url":"/filing/0001689237-26-000006#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (PRESIDENT AND CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"PRESIDENT AND CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":1244.0,"shares_display":"1,244","price_per_share":94.06,"price_display":"94.06","price_state":"stated","total_value":117010.64,"total_display":"117,010.64","total_whole":"117,011","shares_owned_after":132282.0,"shares_owned_after_display":"132,282","ownership_form":"D","is_10b5_1":null,"transaction_date":"2026-04-01","filed_date":"2026-04-02","scope":"insider"},{"id":6140049,"accession":"0001689237-26-000004","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001689237-26-000004","line_url":"/filing/0001689237-26-000004#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (PRESIDENT AND CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"PRESIDENT AND CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":1244.0,"shares_display":"1,244","price_per_share":90.0,"price_display":"90.00","price_state":"stated","total_value":111960.0,"total_display":"111,960.00","total_whole":"111,960","shares_owned_after":133526.0,"shares_owned_after_display":"133,526","ownership_form":"D","is_10b5_1":null,"transaction_date":"2026-03-24","filed_date":"2026-03-26","scope":"insider"},{"id":2039653,"accession":"0001415889-24-007504","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001415889-24-007504","line_url":"/filing/0001415889-24-007504#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (PRESIDENT AND CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"PRESIDENT AND CEO","security_title":"Common Stock","transaction_code":"P","transaction_label":"Open-market purchase","open_market":true,"acquired_disposed":"A","direction_word":"acquired","shares":440.0,"shares_display":"440","price_per_share":112.39,"price_display":"112.39","price_state":"stated","total_value":49451.6,"total_display":"49,451.60","total_whole":"49,452","shares_owned_after":57754.0,"shares_owned_after_display":"57,754","ownership_form":"D","is_10b5_1":null,"transaction_date":"2024-03-11","filed_date":"2024-03-11","scope":"insider"},{"id":7923287,"accession":"0001209191-23-048639","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001209191-23-048639","line_url":"/filing/0001209191-23-048639#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (President and CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"President and CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":3405.0,"shares_display":"3,405","price_per_share":179.25,"price_display":"179.25","price_state":"stated","total_value":610346.25,"total_display":"610,346.25","total_whole":"610,346","shares_owned_after":57787.0,"shares_owned_after_display":"57,787","ownership_form":"D","is_10b5_1":null,"transaction_date":"2023-09-07","filed_date":"2023-09-07","scope":"insider"},{"id":7898123,"accession":"0001209191-23-035383","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001209191-23-035383","line_url":"/filing/0001209191-23-035383#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (President and CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"President and CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":3509.0,"shares_display":"3,509","price_per_share":173.41,"price_display":"173.41","price_state":"stated","total_value":608495.69,"total_display":"608,495.69","total_whole":"608,496","shares_owned_after":61192.0,"shares_owned_after_display":"61,192","ownership_form":"D","is_10b5_1":null,"transaction_date":"2023-06-08","filed_date":"2023-06-08","scope":"insider"},{"id":7870037,"accession":"0001209191-23-032151","txn_seq":1,"anchor":"line-1","filing_url":"/filing/0001209191-23-032151","line_url":"/filing/0001209191-23-032151#line-1","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (President and CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"President and CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":4980.0,"shares_display":"4,980","price_per_share":153.13,"price_display":"153.13","price_state":"stated","total_value":762587.4,"total_display":"762,587.40","total_whole":"762,587","shares_owned_after":64701.0,"shares_owned_after_display":"64,701","ownership_form":"D","is_10b5_1":null,"transaction_date":"2023-05-25","filed_date":"2023-05-25","scope":"insider"},{"id":8438610,"accession":"0001209191-23-029947","txn_seq":5,"anchor":"line-5","filing_url":"/filing/0001209191-23-029947","line_url":"/filing/0001209191-23-029947#line-5","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Director, Officer (President and CEO)","role_mark":"D","role_mark_label":"Director","role_mark_generic":"Director","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"President and CEO","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":8309.0,"shares_display":"8,309","price_per_share":130.76,"price_display":"130.76","price_state":"stated","total_value":1086484.84,"total_display":"1,086,484.84","total_whole":"1,086,485","shares_owned_after":71239.0,"shares_owned_after_display":"71,239","ownership_form":"D","is_10b5_1":null,"transaction_date":"2023-05-16","filed_date":"2023-05-16","scope":"insider"},{"id":7949093,"accession":"0001209191-23-008712","txn_seq":2,"anchor":"line-2","filing_url":"/filing/0001209191-23-008712","line_url":"/filing/0001209191-23-008712","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Officer (EVP, Global Cust & Eng Ops)","role_mark":"O","role_mark_label":"Officer (EVP, Global Cust & Eng Ops)","role_mark_generic":"Officer","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"EVP, Global Cust & Eng Ops","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":9630.0,"shares_display":"9,630","price_per_share":125.71601869158879,"price_display":"125.72","price_state":"stated","total_value":1210645.26,"total_display":"1,210,645.26","total_whole":"1,210,645","shares_owned_after":60185.0,"shares_owned_after_display":"60,185","ownership_form":"D","is_10b5_1":null,"transaction_date":"2023-02-13","filed_date":"2023-02-13","scope":"insider","n_lines":2},{"id":6787985,"accession":"0001209191-22-056381","txn_seq":2,"anchor":"line-2","filing_url":"/filing/0001209191-22-056381","line_url":"/filing/0001209191-22-056381","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Officer (EVP, Global Cust & Eng Ops)","role_mark":"O","role_mark_label":"Officer (EVP, Global Cust & Eng Ops)","role_mark_generic":"Officer","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"EVP, Global Cust & Eng Ops","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":7700.0,"shares_display":"7,700","price_per_share":73.63828181818182,"price_display":"73.64","price_state":"stated","total_value":567014.77,"total_display":"567,014.77","total_whole":"567,015","shares_owned_after":71140.0,"shares_owned_after_display":"71,140","ownership_form":"D","is_10b5_1":null,"transaction_date":"2022-11-10","filed_date":"2022-11-10","scope":"insider","n_lines":2},{"id":4839710,"accession":"0001209191-21-053853","txn_seq":2,"anchor":"line-2","filing_url":"/filing/0001209191-21-053853","line_url":"/filing/0001209191-21-053853#line-2","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Officer (EVP, Engineering)","role_mark":"O","role_mark_label":"Officer (EVP, Engineering)","role_mark_generic":"Officer","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"EVP, Engineering","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":3305.0,"shares_display":"3,305","price_per_share":50.63,"price_display":"50.63","price_state":"stated","total_value":167332.15,"total_display":"167,332.15","total_whole":"167,332","shares_owned_after":71331.0,"shares_owned_after_display":"71,331","ownership_form":"D","is_10b5_1":null,"transaction_date":"2021-08-30","filed_date":"2021-08-30","scope":"insider"},{"id":3312861,"accession":"0001209191-20-031978","txn_seq":3,"anchor":"line-3","filing_url":"/filing/0001209191-20-031978","line_url":"/filing/0001209191-20-031978","is_derivative":false,"issuer_cik":"0001113232","issuer_name":"AXCELIS TECHNOLOGIES INC","issuer_ticker":"ACLS","issuer_name_source":null,"issuer_url":"/issuer/0001113232","owner_cik":"0001689237","owner_name":"Low Russell","owner_display_name":"Low Russell","owner_url":"/insider/0001689237","role":"Officer (EVP, Engineering)","role_mark":"O","role_mark_label":"Officer (EVP, Engineering)","role_mark_generic":"Officer","n_reporting_owners":null,"other_reporting_owners":null,"officer_title":"EVP, Engineering","security_title":"Common Stock","transaction_code":"S","transaction_label":"Open-market sale","open_market":true,"acquired_disposed":"D","direction_word":"disposed","shares":29821.0,"shares_display":"29,821","price_per_share":26.757392106233862,"price_display":"26.76","price_state":"stated","total_value":797932.19,"total_display":"797,932.19","total_whole":"797,932","shares_owned_after":77638.0,"shares_owned_after_display":"77,638","ownership_form":"D","is_10b5_1":null,"transaction_date":"2020-05-26","filed_date":"2020-05-26","scope":"insider","n_lines":2}],"collapsed":true,"next_cursor":null,"ledger_fault":false,"count":{"value":16,"kind":"exact"},"open_market_only":false,"composition":{"kind":"exact","rows":[{"code":"P","label":"Open-market purchase","n":1,"open_market":true},{"code":"S","label":"Open-market sale","n":15,"open_market":true},{"code":"M","label":"Option exercise","n":0,"open_market":false},{"code":"A","label":"Grant or award","n":0,"open_market":false},{"code":"F","label":"Tax withholding","n":0,"open_market":false},{"code":"D","label":"Disposition to the issuer","n":0,"open_market":false},{"code":"X","label":"In-the-money option exercise","n":0,"open_market":false}],"total":16},"affiliations":[{"type":"issuer","type_label":"ISSUER","cik":"0001113232","name":"AXCELIS TECHNOLOGIES INC","url":"/issuer/0001113232","role":"Director, Officer (PRESIDENT AND CEO)","n_filings":13,"first_seen":"2020-05-26","last_seen":"2026-05-07"}],"order_statement":"Newest transaction date first, id breaking the tie.","canonical_url":"https://ebomi.com/insider/0001689237","retrieved_at":"2026-08-24T02:53:30+00:00","coverage":{"filings":1506293,"transactions":4290787,"issuers":28597,"insiders":152303,"first_filed_date":"2003-06-30","last_filed_date":"2026-08-21","last_ingest":"2026-08-22T05:23:40.159918+00:00","counts_are":{"filings":"estimate","transactions":"estimate","issuers":"estimate","insiders":"estimate"},"source":"SEC EDGAR Form 4 filings, parsed by ebomi","fault":false},"license":{"underlying_records":"US SEC filings are public records of the United States government and are not subject to copyright. The transactional facts in them are not ours to license.","this_presentation":"The parsing, normalisation, curation, and presentation are ebomi's own work.","grant":"undecided","grant_note":"The open licence for ebomi's own layer is an open owner decision (SPEC-20260731T1159Z open question 3: CC BY 4.0 or CC0 with a citation request). Until it is taken, no grant is asserted here.","citation_request":"Balogh, A. Insider trading. Scientific Data 10, 237 (2023)","url":"https://ebomi.com/license"},"fair_use":{"policy":"These JSON endpoints are open and unauthenticated. Please read them at a human pace, identify your client in the User-Agent header, and use the published dataset for bulk work rather than crawling page by page.","bulk_alternative":"doi:10.1038/s41597-023-02147-6"}}